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雑誌表面科学
Volume number25(4) 2004.4
ArticleXPSスペクトル変化...

XPSスペクトル変化に現れるイオン照射による金属酸化物の損傷 (特集:表面分析時における不可避な損傷の評価)

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XPSスペクトル変化に現れるイオン照射による金属酸化物の損傷(特集:表面分析時における不可避な損傷の評価)

Call No. (NDL)
Z15-379
Bibliographic ID of National Diet Library
6919658
Material type
記事
Author
橋本 哲
Publisher
東京 : 日本表面科学会
Publication date
2004-04
Material Format
Digital
Journal name
表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編 25(4) 2004.4
Publication Page
p.198～204
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Detailed bibliographic record

Summary, etc.：

XPS or AES sputter depth profiling sometimes encounters difficulties with the materials that are damaged by ion bombardment. Therefore, it becomes dif...

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Digital

Material Type
記事
Title
XPSスペクトル変化に現れるイオン照射による金属酸化物の損傷
Author/Editor
橋本 哲
Series Title
特集:表面分析時における不可避な損傷の評価
Author Heading
橋本 哲
Periodical title
表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
No. or year of volume/issue
25(4) 2004.4
Volume
25
Issue
4
Pages
198～204