Nucleation Control in Solid-Phase Crystallization of a-Si/SiO2 by Local Ge Insertion (Special Issue: Solid State Devices and Materials)

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Nucleation Control in Solid-Phase Crystallization of a-Si/SiO2 by Local Ge Insertion(Special Issue: Solid State Devices and Materials)

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6938840

Material type: 記事

Author: Isao Tsunodaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2004-04

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 43(4B) (通号 591) (Special Issue) 2004.4

Publication Page: p.1901～1904

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Summary, etc.：: The effects of local Ge insertion on the solid-phase crystallization (SPC) of a-Si films have been investigated. Three types of stacked structures, i....

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Material Type: 記事
Title: Nucleation Control in Solid-Phase Crystallization of a-Si/SiO2 by Local Ge Insertion
Author/Editor: Isao Tsunoda
Kei Nagatomo
Atsushi Kenjo 他
Series Title: Special Issue: Solid State Devices and Materials
Author Heading: Isao Tsunoda
Kei Nagatomo
Atsushi Kenjo
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 43(4B) (通号 591) (Special Issue) 2004.4
Volume: 43
Issue: 4B
Sequential issue number: 591
Other Volume: Special Issue
Pages: 1901～1904
Publication date of volume/issue (W3CDTF): 2004-04
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: thin-film transistor
poly-Si
poly-SiGe
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226662
https://dl.ndl.go.jp/pid/11226662
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6938840
http://id.ndl.go.jp/bib/6938840
Bibliographic Record Category (NDL): 632