結晶軸に沿ったZnイオン注入によるGaNの高抵抗化(小特集〔日本真空協会〕関西部会企画)

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Material Type: 記事
Title: 結晶軸に沿ったZnイオン注入によるGaNの高抵抗化
Author/Editor: 大石敏之
三浦成久
吹田宗義他
Series Title: 小特集〔日本真空協会〕関西部会企画
Author Heading: 大石敏之
三浦成久
吹田宗義
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 47(4) 2004.4
Volume: 47
Issue: 4
Pages: 328～333
Publication date of volume/issue (W3CDTF): 2004-04
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6949331
http://id.ndl.go.jp/bib/6949331
Bibliographic Record Category (NDL): 632