An Innovative Method for Contact Hole Printing with Binary Mask and Single Exposure (Special Issue: Microprocesses & Nanotechnology)

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CiNii Research

An Innovative Method for Contact Hole Printing with Binary Mask and Single Exposure(Special Issue: Microprocesses & Nanotechnology)

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6996238

Material type: 記事

Author: Kenji Yamazoeほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2004-06

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 43(6B) (通号 595) (Special Issue) 2004.6

Publication Page: p.3653～3662

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Detailed bibliographic record

Summary, etc.：: We have introduced a new method for fine contact hole printing using a specially designed binary mask and modified illumination in a single exposure, ...

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Material Type: 記事
Title: An Innovative Method for Contact Hole Printing with Binary Mask and Single Exposure
Author/Editor: Kenji Yamazoe
Kenji Saitoh
Akiyoshi Suzuki
Series Title: Special Issue: Microprocesses & Nanotechnology
Author Heading: Kenji Yamazoe
Kenji Saitoh
Akiyoshi Suzuki
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 43(6B) (通号 595) (Special Issue) 2004.6
Volume: 43
Issue: 6B
Sequential issue number: 595
Other Volume: Special Issue
Pages: 3653～3662
Publication date of volume/issue (W3CDTF): 2004-06
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: optical microlithography
resolution enhancement techniques
contact hole
IDEAL
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NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226667
https://dl.ndl.go.jp/pid/11226667
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6996238
http://id.ndl.go.jp/bib/6996238
Bibliographic Record Category (NDL): 632