電流検出型原子間力顕微鏡を用いたゲート絶縁膜の局所リーク電流評価

Journal name: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 104(135) 2004.6.22

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Material Type: 記事
Title: 電流検出型原子間力顕微鏡を用いたゲート絶縁膜の局所リーク電流評価
Author/Editor: 世古明義
渡辺行彦
近藤博基他
Author Heading: 世古明義
渡辺行彦
近藤博基
Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue: 104(135) 2004.6.22
Volume: 104
Issue: 135
Pages: 31～36
Publication date of volume/issue (W3CDTF): 2004-06-22
ISSN (Periodical Title): 0913-5685
ISSN-L (Periodical Title): 0913-5685
Publication (Periodical Title): 東京 : 電子情報通信学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 捕獲
Gate dielectric
Conductive atomic force microscopy
leakage current
Trap
NDLC: ZN33
Target Audience: 一般
Report No. (Article): SDM2004-52
Holding library: 国立国会図書館
Call No.: Z16-940
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7036759
http://id.ndl.go.jp/bib/7036759
Bibliographic Record Category (NDL): 632