シリコン基板メニスカス面におけるマランゴニ力に関する考察--基板上のパーティクル除去と付着に及ぼすマランゴニ力の影響

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: シリコン基板メニスカス面におけるマランゴニ力に関する考察--基板上のパーティクル除去と付着に及ぼすマランゴニ力の影響
Author/Editor: 矢田秀雄
春日博文
Author Heading: 矢田秀雄
春日博文
Periodical title: 日本機械学会論文集. B編
No. or year of volume/issue: 70(695) 2004.7
Volume: 70
Issue: 695
Pages: 1651～1656
Publication date of volume/issue (W3CDTF): 2004-07
ISSN (Periodical Title): 0387-5016
ISSN-L (Periodical Title): 0387-5016
Publication (Periodical Title): 東京 : 日本機械学会 ; 1979-2010
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Marangoni Force
Surface Tension Gradient
C.F.D
Organics
Mass Transfer
Diffusion
Meniscus
Curvature
Boundary Layer
Particle Removal and Adhesion
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-109
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7045753
http://id.ndl.go.jp/bib/7045753
Bibliographic Record Category (NDL): 632