ナノ精度機械加工専門委員会 M4プロセスの新しい世界を拓く--ナノ精度サブミリ機械加工 (特集 〔精密工学会〕専門委員会・分科会研究レビュー)
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- Material Type
- 記事
- Author/Editor
- 厨川 常元
- Series Title
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 70(8) (通号 836) 2004.8
- Volume
- 70
- Issue
- 8
- Sequential issue number
- 836