Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing

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CiNii Research

Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 7079003

Material type: 記事

Author: Koichi Sudohほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2004-09

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 43(9A) (通号 600) 2004.9

Publication Page: p.5937～5941

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Detailed bibliographic record

Summary, etc.：: We have studied shape transformation of micron-sized trenches on Si substrates during high temperature hydrogen annealing, performing numerical simula...

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Digital

Material Type: 記事
Title: Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing
Author/Editor: Koichi Sudoh
Hiroshi Iwasaki
Hitoshi Kuribayashi 他
Author Heading: Koichi Sudoh
Hiroshi Iwasaki
Hitoshi Kuribayashi
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 43(9A) (通号 600) 2004.9
Volume: 43
Issue: 9A
Sequential issue number: 600
Pages: 5937～5941
Publication date of volume/issue (W3CDTF): 2004-09
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: silicon
trench
shape transformation
simulation
surface diffusion
hydrogen anneal
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226672
https://dl.ndl.go.jp/pid/11226672
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7079003
http://id.ndl.go.jp/bib/7079003
Bibliographic Record Category (NDL): 632