カーボンナノチューブの生成過程観察のための走査型電子顕微鏡内局所CVD装置の開発
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- Material Type
- 記事
- Author/Editor
- 糟谷 圭吾大井 健土屋 健介 他
- Periodical title
- 精密工学会誌論文集 / 会誌編集委員会 編
- No. or year of volume/issue
- 71(2) (通号 842) 2005.2
- Volume
- 71
- Issue
- 2
- Sequential issue number
- 842
- Pages
- 211~215