SIサイリスタを用いたナノパルス電源による大気圧下でのダイヤモンド状炭素膜成膜

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Material Type: 記事
Title: SIサイリスタを用いたナノパルス電源による大気圧下でのダイヤモンド状炭素膜成膜
Author/Editor: 近藤好正
齊藤隆雄
細野慎太郎他
Author Heading: 近藤好正
齊藤隆雄
細野慎太郎
Periodical title: SIデバイスシンポジウム講演論文集
No. or year of volume/issue: (通号 17) 2004
Sequential issue number: 17
Pages: 9～14
Publication date of volume/issue (W3CDTF): 2004
ISSN (Periodical Title): 1340-5853
ISSN-L (Periodical Title): 1340-5853
Publication (Periodical Title): [厚木] : [SIデバイス研究会]
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Report No. (Article): SSID-04-2
Holding library: 国立国会図書館
Call No.: Z16-B147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7248750
http://id.ndl.go.jp/bib/7248750
Bibliographic Record Category (NDL): 632