水ジェットターゲットを用いたレーザー生成プラズマからの極端紫外光の高効率化

Journal name: レーザー研究 = The review of laser engineering : レーザー学会誌 / レーザー学会編 33(2) 2005.2

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Material Type: 記事
Title: 水ジェットターゲットを用いたレーザー生成プラズマからの極端紫外光の高効率化
Author/Editor: 東口武史
Chirag Rajyaguru
古賀方土他
Author Heading: 東口武史
Chirag Rajyaguru
古賀方土
Periodical title: レーザー研究 = The review of laser engineering : レーザー学会誌 / レーザー学会編
No. or year of volume/issue: 33(2) 2005.2
Volume: 33
Issue: 2
Pages: 126～129
Publication date of volume/issue (W3CDTF): 2005-02
ISSN (Periodical Title): 0387-0200
ISSN-L (Periodical Title): 0387-0200
Publication (Periodical Title): 吹田 : レーザー学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Extreme ultraviolet (EUV) emission
Laser-produced plasma
LPP
EUV lithography
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1040
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7255521
http://id.ndl.go.jp/bib/7255521
Bibliographic Record Category (NDL): 632