400mmシリコンウェハの非接触静電浮上

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Material Type: 記事
Title: 400mmシリコンウェハの非接触静電浮上
Author/Editor: 山下典理男
山本晃生
樋口俊郎他
Author Heading: 山下典理男
山本晃生
樋口俊郎
Periodical title: 精密工学会誌論文集 / 会誌編集委員会編
No. or year of volume/issue: 71(3) (通号 843) 2005.3
Volume: 71
Issue: 3
Sequential issue number: 843
Pages: 342～346
Publication date of volume/issue (W3CDTF): 2005-03
ISSN (Periodical Title): 1348-8724
ISSN-L (Periodical Title): 1348-8716
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: silicon wafer
400mm wafer
electrostatic force
electrostatic levitation
on-off control
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-D889
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7288207
http://id.ndl.go.jp/bib/7288207
Bibliographic Record Category (NDL): 632