雑誌精密工学会誌論文集
Volume number71(1) (通号 841)-71(6) (通号 846) 20050100-20050600
Article基板励振による薄膜の...

基板励振による薄膜の残留応力制御の機構

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基板励振による薄膜の残留応力制御の機構

Call No. (NDL)
Z74-D889
Bibliographic ID of National Diet Library
7318182
Material type
記事
Author
鈴木 崇雅ほか
Publisher
東京 : 精密工学会
Publication date
2005-04
Material Format
Paper
Journal name
精密工学会誌論文集 / 会誌編集委員会 編 71(4) (通号 844) 2005.4
Publication Page
p.460～465
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Material Type
記事
Title
基板励振による薄膜の残留応力制御の機構
Author/Editor
鈴木 崇雅
松室 昭仁
高橋 裕
Author Heading
鈴木 崇雅
松室 昭仁
高橋 裕
Periodical title
精密工学会誌論文集 / 会誌編集委員会 編
No. or year of volume/issue
71(4) (通号 844) 2005.4
Volume
71
Issue
4
Sequential issue number
844
Pages
460～465