雑誌Proceedings of the Chemical Sensor Symposium
Volume number38-40 20040300-20050900
Article酸化インジウム薄膜マ...

酸化インジウム薄膜マイクロセンサの塩素ガス検知特性に及ぼすマイクロギャップの効果

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酸化インジウム薄膜マイクロセンサの塩素ガス検知特性に及ぼすマイクロギャップの効果

Call No. (NDL)
Z14-1675
Bibliographic ID of National Diet Library
7334896
Material type
記事
Author
新美 潤ほか
Publisher
長崎 : 電気化学会化学センサ研究会
Publication date
2005-04
Material Format
Paper
Journal name
Proceedings of the Chemical Sensor Symposium 39 2005.4
Publication Page
p.19～21
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Paper

Material Type
記事
Title
酸化インジウム薄膜マイクロセンサの塩素ガス検知特性に及ぼすマイクロギャップの効果
Author/Editor
新美 潤
小椋 俊介
小西 聡 他
Author Heading
新美 潤
小椋 俊介
小西 聡
Periodical title
Proceedings of the Chemical Sensor Symposium
No. or year of volume/issue
39 2005.4
Volume
39
Pages
19～21
Publication date of volume/issue (W3CDTF)
2005-04
Publication (Periodical Title)
長崎 : 電気化学会化学センサ研究会