Two-Dimensional Distributions of Ti and Ti〔+〕 Densities in High-Pressure Magnetron Sputtering Discharges
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- Material Type
- 記事
- Author/Editor
- Nayan NafarizalNoriharu TakadaKanji Shibagaki 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part 2, Letters & express letters
- No. or year of volume/issue
- 44(20-23) (通号 429) 2005
- Volume
- 44
- Issue
- 20-23
- Sequential issue number
- 429
- Pages
- L737～739