極薄イットリウムアルミネート絶縁膜の物性及び電気的特性評価 (特集:ゲート絶縁膜/Si界面の評価)

極薄イットリウムアルミネート絶縁膜の物性及び電気的特性評価

(特集:ゲート絶縁膜/Si界面の評価)

Journal name: 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会編 26(5) 2005.5

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Material Type: 記事
Title: 極薄イットリウムアルミネート絶縁膜の物性及び電気的特性評価
Author/Editor: 杉田義博
池田和人
泉由貴子他
Series Title: 特集:ゲート絶縁膜/Si界面の評価
Author Heading: 杉田義博
池田和人
泉由貴子
Periodical title: 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会編
No. or year of volume/issue: 26(5) 2005.5
Volume: 26
Issue: 5
Pages: 255～260
Publication date of volume/issue (W3CDTF): 2005-05
ISSN (Periodical Title): 0388-5321
ISSN-L (Periodical Title): 0388-5321
Publication (Periodical Title): 東京 : 日本表面科学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-379
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7353217
http://id.ndl.go.jp/bib/7353217
Bibliographic Record Category (NDL): 632