HfAlOx/下地膜界面反応抑制の検討(特集:ゲート絶縁膜/Si界面の評価)

Journal name: 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会編 26(5) 2005.5

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: HfAlOx/下地膜界面反応抑制の検討
Author/Editor: 三橋理一郎
堀内淳
川原孝明他
Series Title: 特集:ゲート絶縁膜/Si界面の評価
Author Heading: 三橋理一郎
堀内淳
川原孝明
Periodical title: 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会編
No. or year of volume/issue: 26(5) 2005.5
Volume: 26
Issue: 5
Pages: 261～267
Publication date of volume/issue (W3CDTF): 2005-05
ISSN (Periodical Title): 0388-5321
ISSN-L (Periodical Title): 0388-5321
Publication (Periodical Title): 東京 : 日本表面科学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-379
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7353220
http://id.ndl.go.jp/bib/7353220
Bibliographic Record Category (NDL): 632