Recovery from Dry Etching Damage in ZnTe by Thermal Annealing
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- Material Type
- 記事
- Author/Editor
- Qixin GuoYusukei KumeTooru Tanaka 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part 2, Letters & express letters
- No. or year of volume/issue
- 44(24-27) (通号 430) 2005
- Volume
- 44
- Issue
- 24-27
- Sequential issue number
- 430
- Pages
- L863～865