極薄シリコン酸窒化膜の種々の結合形態にある窒素原子の深さ方向分布

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極薄シリコン酸窒化膜の種々の結合形態にある窒素原子の深さ方向分布

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
7367438
Material type
記事
Author
野平 博司ほか
Publisher
東京 : 電子情報通信学会
Publication date
2005-06-09
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 105(108) 2005.6.9
Publication Page
p.49~54
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Paper

Material Type
記事
Author/Editor
野平 博司
品川 盛治
生田 哲也 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
105(108) 2005.6.9
Volume
105
Issue
108
Pages
49~54
Publication date of volume/issue (W3CDTF)
2005-06-09