Low-Temperature Oxidation of Silicon using UV-Light-Excited Ozone
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- Material Type
- 記事
- Author/Editor
- Aki TosakaTetsuya NishiguchiHidehiko Nonaka 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part 2, Letters & express letters
- No. or year of volume/issue
- 44(33-36) (通号 432) 2005
- Volume
- 44
- Issue
- 33-36
- Sequential issue number
- 432
- Pages
- L1144～1146