高周波スパッタ法によるサーメット薄膜抵抗の研究-1-タンタル-ガラス系について
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- Material Type
- 記事
- Author/Editor
- 梅沢 利二 他
- Author Heading
- Periodical title
- 応用電気研究所報告
- No. or year of volume/issue
- 24(3) 1973.02
- Volume
- 24
- Issue
- 3
- Pages
- 73～88
- Publication date of volume/issue (W3CDTF)
- 1973-02