雑誌応用物理
Volume number43(1)-43(4) 19740100-19740400
ArticleCVD膜の粗密性と吸...

CVD膜の粗密性と吸湿性の定量的検討

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CVD膜の粗密性と吸湿性の定量的検討

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
7503815
Material type
記事
Author
柳沢 寛 他
Publisher
東京 : 応用物理学会
Publication date
1974-04
Material Format
Paper
Journal name
応用物理 43(4) 1974.04
Publication Page
p.330～334
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Paper

Material Type
記事
Title
CVD膜の粗密性と吸湿性の定量的検討
Author/Editor
柳沢 寛 他
Author Heading
柳沢 寛
Periodical title
応用物理
No. or year of volume/issue
43(4) 1974.04
Volume
43
Issue
4
Pages
330～334
Publication date of volume/issue (W3CDTF)
1974-04