Volume number81(9) 2005.9
磁場中RFプラズマC...

磁場中RFプラズマCVDによるカーボンナノチューブ配向成長 (小特集 プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題)

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磁場中RFプラズマCVDによるカーボンナノチューブ配向成長(小特集 プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題)

Call No. (NDL)
Z15-8
Bibliographic ID of National Diet Library
7677987
Material type
記事
Author
畠山 力三ほか
Publisher
名古屋 : プラズマ・核融合学会編集委員会
Publication date
2005-09
Material Format
Digital
Journal name
プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編 81(9) 2005.9
Publication Page
p.653~659
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Detailed bibliographic record

Summary, etc.:

The plasma-enhanced chemical vapor deposition method, which has such benefits as low synthesis temperature and vertical alignment control, was success...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
畠山 力三
加藤 俊顕
Periodical title
プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
No. or year of volume/issue
81(9) 2005.9
Volume
81
Issue
9
Pages
653~659