Nd:YAG高周波レーザによる窒化アルミニウムの微細穴加工 (第184回電気加工研究会)

Nd:YAG高周波レーザによる窒化アルミニウムの微細穴加工

(第184回電気加工研究会)

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Material Type: 記事
Title: Nd:YAG高周波レーザによる窒化アルミニウムの微細穴加工
Author/Editor: 岡本康寛
宇野義幸
片岡範生
Series Title: 第184回電気加工研究会
Author Heading: 岡本康寛
宇野義幸
片岡範生
Periodical title: 電気加工技術
No. or year of volume/issue: 29(92) 2005.6.10
Volume: 29
Issue: 92
Pages: 8～13
Publication date of volume/issue (W3CDTF): 2005-06-10
ISSN (Periodical Title): 0389-1550
ISSN-L (Periodical Title): 0389-1550
Publication (Periodical Title): 東京 : 電気加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1136
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7696355
http://id.ndl.go.jp/bib/7696355
Bibliographic Record Category (NDL): 632