Improved resolution of a projection lens by a phase shifting mask and a cover glass

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Material Type: 記事
Title: Improved resolution of a projection lens by a phase shifting mask and a cover glass
Author/Editor: Y. Okamoto
M. Ogita
Author Heading: Y. Okamoto
M. Ogita
Periodical title: 静岡大学大学院電子科学研究科研究報告
No. or year of volume/issue: (26) 2005.3
Issue: 26
Pages: 39～41
Publication date of volume/issue (W3CDTF): 2005-03
ISSN (Periodical Title): 0388-5070
ISSN-L (Periodical Title): 0388-5070
Publication (Periodical Title): 浜松 : 静岡大学大学院電子科学研究科
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: laser beam
interference
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1103
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7706311
http://id.ndl.go.jp/bib/7706311
Bibliographic Record Category (NDL): 632