スパッタ金属膜によるき裂長さの測定

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Material Type: 記事
Title: スパッタ金属膜によるき裂長さの測定
Author/Editor: Gang Deng
徳永仁夫
Tilahun Daniel Redda 他
Author Heading: Gang Deng
徳永仁夫
Tilahun Daniel Redda
Periodical title: 日本機械学会論文集. C編
No. or year of volume/issue: 72(715) 2006.3
Volume: 72
Issue: 715
Pages: 997～1002
Publication date of volume/issue (W3CDTF): 2006-03
ISSN (Periodical Title): 0387-5024
ISSN-L (Periodical Title): 0387-5024
Publication (Periodical Title): 東京 : 日本機械学会 ; 1979-2010
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Crack Length Measurement
Thin Film
Ion Sputtered Film
Micro-Crack
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1056
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7906387
http://id.ndl.go.jp/bib/7906387
Bibliographic Record Category (NDL): 632