3自由度アザラシ型位置決め機構の移動特性の改善 (特集:ブレークスルーを生み出すマイクロアクチュエータ)
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- Material Type
- 記事
- Author/Editor
- 古谷 克司河越 克己
- Series Title
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 126(4) 2006.4
- Volume
- 126
- Issue
- 4
- Pages
- 131～136