Reversal of UV Sensitivity and Loss Reduction of SiON Microring Resonator by Thermal Annealing

Journal name: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106(54) 2006.5.19

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Material Type: 記事
Title: Reversal of UV Sensitivity and Loss Reduction of SiON Microring Resonator by Thermal Annealing
Author/Editor: 帶刀崇
上野哲
大平俊行他
Author Heading: 帶刀崇
上野哲
大平俊行
Alternative Title: マイクロリング共振器用SiON光導波膜の紫外線感光性の起源と低損失化の探求
Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue: 106(54) 2006.5.19
Volume: 106
Issue: 54
Pages: 37～42
Publication date of volume/issue (W3CDTF): 2006-05-19
ISSN (Periodical Title): 0913-5685
ISSN-L (Periodical Title): 0913-5685
Publication (Periodical Title): 東京 : 電子情報通信学会
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: マイクロ共振器
トリミング
プラズマCVD
陽電子寿命測定
PALS
赤外線スペクトル吸光測定
IR測定
アニール
trimming
plasma enhanced chemical vapor deposition
PECVD
positron annihilation lifetime spectroscopy
IR spectroscopy
NDLC: ZN33
Target Audience: 一般
Report No. (Article): OPE2006-14
Holding library: 国立国会図書館
Call No.: Z16-940
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7938548
http://id.ndl.go.jp/bib/7938548
Bibliographic Record Category (NDL): 632