レイアウトに依存した電解メッキによる銅膜生成モデル

Journal name: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106(115) 2006.6.22

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Material Type: 記事
Title: レイアウトに依存した電解メッキによる銅膜生成モデル
Author/Editor: 福田大輔
松岡英俊
澁谷利行
Author Heading: 福田大輔
松岡英俊
澁谷利行
Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue: 106(115) 2006.6.22
Volume: 106
Issue: 115
Pages: 7～12
Publication date of volume/issue (W3CDTF): 2006-06-22
ISSN (Periodical Title): 0913-5685
ISSN-L (Periodical Title): 0913-5685
Publication (Periodical Title): 東京 : 電子情報通信学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: CMP
DFM
ECP
NDLC: ZN33
Target Audience: 一般
Report No. (Article): SIP2006-25
Holding library: 国立国会図書館
Call No.: Z16-940
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7975847
http://id.ndl.go.jp/bib/7975847
Bibliographic Record Category (NDL): 632