Nd:YAG高調波レーザによる窒化アルミニウムの加工特性評価--レーザ光の波長が加工特性に及ぼす影響

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Material Type: 記事
Title: Nd:YAG高調波レーザによる窒化アルミニウムの加工特性評価--レーザ光の波長が加工特性に及ぼす影響
Author/Editor: 岡本康寛
片岡範生
宇野義幸他
Author Heading: 岡本康寛
片岡範生
宇野義幸
Periodical title: 精密工学会誌論文集 / 会誌編集委員会編
No. or year of volume/issue: 72(6) (通号 858) 2006.6
Volume: 72
Issue: 6
Sequential issue number: 858
Pages: 725～729
Publication date of volume/issue (W3CDTF): 2006-06
ISSN (Periodical Title): 1348-8724
ISSN-L (Periodical Title): 1348-8716
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Nd:YAG laser
harmonics
drilling
aluminum nitride
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-D889
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7984278
http://id.ndl.go.jp/bib/7984278
Bibliographic Record Category (NDL): 632