マグネトロンスパッタリング法によるホウ素含有薄膜の創成とその機械的特性の評価--反応ガス添加の影響

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Material Type: 記事
Title: マグネトロンスパッタリング法によるホウ素含有薄膜の創成とその機械的特性の評価--反応ガス添加の影響
Author/Editor: 神崎昌郎
Author Heading: 神崎昌郎
Periodical title: 精密工学会誌論文集 / 会誌編集委員会編
No. or year of volume/issue: 72(6) (通号 858) 2006.6
Volume: 72
Issue: 6
Sequential issue number: 858
Pages: 756～760
Publication date of volume/issue (W3CDTF): 2006-06
ISSN (Periodical Title): 1348-8724
ISSN-L (Periodical Title): 1348-8716
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: boron
B-C-N
mechanical property
magnetron sputtering
reactive gas
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-D889
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7984342
http://id.ndl.go.jp/bib/7984342
Bibliographic Record Category (NDL): 632