超音波計測 薄膜の異...

超音波計測 薄膜の異方性弾性定数測定--銅薄膜の弾性異方性と内部組織

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超音波計測 薄膜の異方性弾性定数測定--銅薄膜の弾性異方性と内部組織

Call No. (NDL)
Z14-1555
Bibliographic ID of National Diet Library
8042670
Material type
記事
Author
中村 暢伴ほか
Publisher
東京 : 日本工業出版
Publication date
2006
Material Format
Paper
Journal name
超音波techno / 超音波techno編集部 編 18(4) (通号 181) 2006.7・8
Publication Page
p.103~107,127
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Paper

Material Type
記事
Author/Editor
中村 暢伴
荻 博次
平尾 雅彦
Periodical title
超音波techno / 超音波techno編集部 編
No. or year of volume/issue
18(4) (通号 181) 2006.7・8
Volume
18
Issue
4
Sequential issue number
181
Pages
103~107,127