Ge単結晶のEtchingにおけるEtchpitsの成長変化とEtchant濃度,流量の関係について

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Material Type: 記事
Title: Ge単結晶のEtchingにおけるEtchpitsの成長変化とEtchant濃度,流量の関係について
Author/Editor: 八木寛他
Author Heading: 八木寛
Periodical title: 富山大学工学部紀要
No. or year of volume/issue: (通号 22) 1971.03
Sequential issue number: 22
Pages: 9～15
Publication date of volume/issue (W3CDTF): 1971-03
ISSN (Periodical Title): 0387-1339
ISSN-L (Periodical Title): 0387-1339
Publication (Periodical Title): 富山 : 富山大学工学部紀要委員会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-247
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8343800
http://id.ndl.go.jp/bib/8343800
Bibliographic Record Category (NDL): 632