高温気相反応による炭...

高温気相反応による炭化珪素の結晶成長(化学蒸着法(Chemical vapor deposition)に関する基礎的研究-2-)

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高温気相反応による炭化珪素の結晶成長(化学蒸着法(Chemical vapor deposition)に関する基礎的研究-2-)

Call No. (NDL)
Z17-249
Bibliographic ID of National Diet Library
8468122
Material type
記事
Author
河嶋 千尋 他
Publisher
東京 : 窯業協会
Publication date
1967-03
Material Format
Paper
Journal name
窯業協会誌 75(3) 1967.03
Publication Page
p.74~77
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Paper Digital

Material Type
記事
Author/Editor
河嶋 千尋 他
Author Heading
Periodical title
窯業協会誌
No. or year of volume/issue
75(3) 1967.03
Volume
75
Issue
3
Pages
74~77
Publication date of volume/issue (W3CDTF)
1967-03