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レーザスペックル干渉を利用した圧電デバイス振動変位分布の絶対測定

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レーザスペックル干渉を利用した圧電デバイス振動変位分布の絶対測定

Call No. (NDL)
Z14-1555
Bibliographic ID of National Diet Library
8517222
Material type
記事
Author
渡部 泰明ほか
Publisher
東京 : 日本工業出版
Publication date
2006
Material Format
Paper
Journal name
超音波techno / 超音波techno編集部 編 18(5) (通号 182) 2006.9・10
Publication Page
p.96~99
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Paper

Material Type
記事
Author/Editor
渡部 泰明
五箇 繁善
佐藤 隆幸 他
Periodical title
超音波techno / 超音波techno編集部 編
No. or year of volume/issue
18(5) (通号 182) 2006.9・10
Volume
18
Issue
5
Sequential issue number
182
Pages
96~99