Control Performance of Interactions between Reactive Plasma Jet and Substrate (Special Issue: Plasma Processing)

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CiNii Research

Control Performance of Interactions between Reactive Plasma Jet and Substrate(Special Issue: Plasma Processing)

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 8519952

Material type: 記事

Author: Hideya Nishiyamaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2006-10

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45(10B) (通号 642) (Special Issue) 2006.10

Publication Page: p.8085～8089

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Detailed bibliographic record

Summary, etc.：: コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌(Provided by: CiNii Research)

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Material Type: 記事
Title: Control Performance of Interactions between Reactive Plasma Jet and Substrate
Author/Editor: Hideya Nishiyama
Takehiko Sato
Shota Niikura 他
Series Title: Special Issue: Plasma Processing
Author Heading: Hideya Nishiyama
Takehiko Sato
Shota Niikura
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 45(10B) (通号 642) (Special Issue) 2006.10
Volume: 45
Issue: 10B
Sequential issue number: 642
Other Volume: Special Issue
Pages: 8085～8089
Publication date of volume/issue (W3CDTF): 2006-10
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: unstable behavior
nitriding
magnetic field
operating pressure
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226712
https://dl.ndl.go.jp/pid/11226712
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8519952
http://id.ndl.go.jp/bib/8519952
Bibliographic Record Category (NDL): 632