磁気トルクを利用したマイクロマシンの小型化に関する検討
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- Material Type
- 記事
- Author/Editor
- 山崎 彩仙道 雅彦石山 和志 他
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 126(11) 2006.11
- Volume
- 126
- Issue
- 11
- Pages
- 590～595
- Publication date of volume/issue (W3CDTF)
- 2006-11