ナノインプリント製造...

ナノインプリント製造技術の概要とMEMS実装分野への応用 (特集 ユビキタス機器を支える次世代実装技術)

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ナノインプリント製造技術の概要とMEMS実装分野への応用

(特集 ユビキタス機器を支える次世代実装技術)

Call No. (NDL)
Z16-225
Bibliographic ID of National Diet Library
8636876
Material type
記事
Author
高橋 正春
Publisher
東京 : 工業調査会
Publication date
2007-01
Material Format
Paper
Journal name
電子材料 46(1) 2007.1
Publication Page
p.23~28
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Paper

Material Type
記事
Author/Editor
高橋 正春
Author Heading
Periodical title
電子材料
No. or year of volume/issue
46(1) 2007.1
Volume
46
Issue
1
Pages
23~28