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単結晶シリコンおよびN[+]イオン注入シリコンのフレッチング摩耗特性

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単結晶シリコンおよびN[+]イオン注入シリコンのフレッチング摩耗特性

Call No. (NDL)
Z14-221
Bibliographic ID of National Diet Library
8744508
Material type
記事
Author
宮崎 俊行ほか
Publisher
習志野 : 千葉工業大学
Publication date
2007
Material Format
Paper
Journal name
千葉工業大学研究報告. 理工編 (54) 2007
Publication Page
p.11~19
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Paper

Material Type
記事
Author/Editor
宮崎 俊行
三宅 正二郎
渡邊 仁之 他
Alternative Title
Fretting wear of single crystal and ion-implanted silicon
Periodical title
千葉工業大学研究報告. 理工編
No. or year of volume/issue
(54) 2007
Issue
54
Pages
11~19
Publication date of volume/issue (W3CDTF)
2007