Si基板上への窒化物半導体のエピタキシャル成長技術とインパクト
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- Material Type
- 記事
- Author/Editor
- 大塚 康二
- Author Heading
- Alternative Title
- Technology for epitaxial growth of nitride semiconductor on Si sbstrate and its impact
- Periodical title
- 応用物理
- No. or year of volume/issue
- 76(5) 2007.5
- Volume
- 76
- Issue
- 5
- Pages
- 489~494