部分一括描画装置の処理能力向上のための描画面積最適化 (特集システムLSI設計とその技術)

部分一括描画装置の処理能力向上のための描画面積最適化

(特集システムLSI設計とその技術)

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Material Type: 記事
Title: 部分一括描画装置の処理能力向上のための描画面積最適化
Author/Editor: 杉原真
松永裕介
村上和彰
Series Title: 特集システムLSI設計とその技術
Author Heading: 杉原真
松永裕介
村上和彰
Alternative Title: Character size optimization for higher throughput of character projection lithography
Periodical title: 情報処理学会論文誌 = IPSJ journal
No. or year of volume/issue: 48(5) 2007.5
Volume: 48
Issue: 5
Pages: 1888～1897
Publication date of volume/issue (W3CDTF): 2007-05
ISSN (Periodical Title): 0387-5806
ISSN-L (Periodical Title): 0387-5806
Publication (Periodical Title): 東京 : 情報処理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM13
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-741
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8821234
http://id.ndl.go.jp/bib/8821234
Bibliographic Record Category (NDL): 632