3次元MEMS構造封止のためのSTP技術とその応用 (特集 MEMSデバイス技術)

3次元MEMS構造封止のためのSTP技術とその応用

(特集 MEMSデバイス技術)

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Material Type: 記事
Title: 3次元MEMS構造封止のためのSTP技術とその応用
Author/Editor: 佐藤昇男
小野一善
森村浩季他
Series Title: 特集 MEMSデバイス技術
Author Heading: 佐藤昇男
小野一善
森村浩季
Periodical title: NTT技術ジャーナル / 日本電信電話株式会社編
No. or year of volume/issue: 19(7) (通号 220) 2007.7
Volume: 19
Issue: 7
Sequential issue number: 220
Pages: 15～18
Publication date of volume/issue (W3CDTF): 2007-07
ISSN (Periodical Title): 0915-2318
ISSN-L (Periodical Title): 0915-2318
Publication (Periodical Title): 東京 : 電気通信協会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: MEMS
封止
STP
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1991
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8880860
http://id.ndl.go.jp/bib/8880860
Bibliographic Record Category (NDL): 632