分析技術 TOF-SIMSと低角斜め切削法を用いたサブミクロン高分子薄膜の組成分析 (評価技術特集)

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分析技術 TOF-SIMSと低角斜め切削法を用いたサブミクロン高分子薄膜の組成分析

(評価技術特集)

Call No. (NDL)
Z17-879
Bibliographic ID of National Diet Library
8882177
Material type
記事
Author
服部 秀男ほか
Publisher
茨木 : 日東電工技術企画部
Publication date
2007
Material Format
Paper
Journal name
日東電工技報 45(1) (通号 88) 2007
Publication Page
p.68~71
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Paper

Material Type
記事
Author/Editor
服部 秀男
山崎 秀樹
Series Title
Periodical title
日東電工技報
No. or year of volume/issue
45(1) (通号 88) 2007
Volume
45
Issue
1
Sequential issue number
88