最近の展望 直線集束ビーム超音波材料解析システムによる極端紫外線リソグラフィー用超低膨張ガラスの超精密評価法の開発
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 櫛引 淳一
- Author Heading
- Alternative Title
- Recent developments: Development of superprecise evaluation method for EUVL-grade ultralow-expansion glass using line-focus-beam ultrasonic material characterization system
- Periodical title
- 応用物理
- No. or year of volume/issue
- 76(7) 2007.7
- Volume
- 76
- Issue
- 7
- Pages
- 771～775