Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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Bibliographic Record
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- Material Type
- 記事
- Title
- Alternative Title
- Special issue: Planarization technology of semiconductor device
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 73(7) (通号 871) 2007.7
- Volume
- 73
- Issue
- 7
- Sequential issue number
- 871
- Pages
- 745～771
- Publication date of volume/issue (W3CDTF)
- 2007-07