Emission and sputtering characteristics of Ne-Ar mixed gas glow discharge plasmas
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- Hyunkook ParkMachiko TsukijiKazuaki Wagatsuma 他
- Author Heading
- Periodical title
- Analytical Sciences
- No. or year of volume/issue
- 23(9) (通号 184) 2007
- Volume
- 23
- Issue
- 9
- Sequential issue number
- 184
- Pages
- 1133～1136