遺伝的アルゴリズムを用いたステッピングモータ駆動方式半導体ウエハ搬送ロボットアームの軌道計画と実験
Digital data available（Japan Link Center）
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 小島 宏行橋本 祥一桑野 好文 他
- Alternative Title
- Trajectory planning of semiconductor wafer transfer robot arm driven by stepping motors using genetic algorithm and experiments
- Periodical title
- 日本ロボット学会誌 = Journal of the Robotics Society of Japan / 日本ロボット学会 編
- No. or year of volume/issue
- 25(5) (通号 177) 2007.7
- Volume
- 25
- Issue
- 5
- Sequential issue number
- 177