小型圧電振動子を用い...

小型圧電振動子を用いた円筒型マイクロ超音波モータ (特集 超音波応用技術の開発)

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小型圧電振動子を用いた円筒型マイクロ超音波モータ

(特集 超音波応用技術の開発)

Call No. (NDL)
Z17-54
Bibliographic ID of National Diet Library
8893316
Material type
記事
Author
神田 岳文
Publisher
東京 : 小峰工業出版
Publication date
2007-08
Material Format
Paper
Journal name
化學工業 58(8) (通号 690) 2007.8
Publication Page
p.595~598
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Paper

Material Type
記事
Author/Editor
神田 岳文
Author Heading
Alternative Title
A cylindrical micro ultrasonic motor driven by micro piezoelectric vibrator
Periodical title
化學工業
No. or year of volume/issue
58(8) (通号 690) 2007.8
Volume
58
Issue
8