アーク・イオンプレーティングによって形成された硬質積層薄膜における残留応力の熱緩和 (特集 X線材料強度)
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- Material Type
- 記事
- Author/Editor
- 松英 達也英 崇夫池内 保一
- Series Title
- Alternative Title
- Thermal relaxation of residual stresses in multi hard films deposited by arc ion plating
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 56(7) 2007.7
- Volume
- 56
- Issue
- 7