スパッタ法により作製したMg-Ni薄膜の特性 (電子部品・材料)

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スパッタ法により作製したMg-Ni薄膜の特性

(電子部品・材料)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
8895787
Material type
記事
Author
愛甲 隆史ほか
Publisher
東京 : 電子情報通信学会
Publication date
2007-08
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 107(178) 2007.8.9・10
Publication Page
p.39~44
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Paper

Material Type
記事
Author/Editor
愛甲 隆史
長浜 大作
平田 真 他
Alternative Title
Characteristics of Mg-Ni thin films deposited by sputtering method
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
107(178) 2007.8.9・10
Volume
107
Issue
178